Product Introduction
Air Bearing Spindle
Ball Bearing Spindle

Vesicular ceramic Vacuum Chuck Table

Wheel Mount
Air Bearing Cylinder
 
Vesicular ceramic Vacuum Chuck Table
Home > Product Introduction>

Vesicular ceramic Vacuum Chuck Table

Vesicular ceramic Vacuum Chuck Table

It makes optimum condition for Dicing Saw, Laser Dicing, Laser marketing, Grooving, Wafer back grinding and Wafer mounting which requires high degree of flatness by optimizing in whole side adsorption or partial adsorption and fixing when do precision machining, clean, and move difficult-to-cut-material such as Silicon wafer, PCB, Glass, Ceramic and QFN using vesicular ceramic porous of alumina line.


Size
Accuracy Flatness
4 ˝
3 ㎛
6 ˝
3 ㎛
8 ˝
5 ㎛
12 ˝
5 ㎛

※ Applicable Material

  • Porous : #100, #180, #240, #2,000
  • Material of base : AL, SUS, Ceramic
  • - It is subject to customize by customer's request.


vesicular ceramic vacuum chuck table
Untitled Document

     
 
Company Introduction   |   Business Introduction  |  

Bearing Product Introduction

  |   R&D  |   Service   |   Customer Center
COPYRIGHT 2012 RPS ALL RIGHTS RESERVED

56, Yuseong-daero 1184beon-gil, Yuseong-gu, Daejeon, 34109 Rep. of KOREA
TEL: 82-42-602-3300(Dir) FAX: 82-42-672-3399 , E-mail:marketing@rps-korea.com

Ball Bearing Spindle

 |

Dicing Spindle

 |

Tapping Spindle

 |

Air Bearing Spindle

 |

PCB Drilling Spindle

 |

Spinner Chuck Table

 |

Edge Grinding Spindle

 |

Vesicular Ceramic Chuck Table

 |

Super precision Actuator

 |

Linear air bearing actuator

 |

High frequency spindle

 |

Durable wheel mount

 |

Machine tool spindle

 |