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Patent status

  • - High precision balancing machine shaft supporter applying air bearing (No. 10-0877120)
  • - Method of manufacturing rotor embodied super high-speed spindle (No.10-1041389)
  • - Hybrid type static pressure air bearing (No.10-1143425)
  • - Manufacturing device for vacuum chuck for temperature adjusting type wafer (No.10-1176821)
  • - Preventive structure against foreign substances in air bearing spindle (No.10-1181705)
  • - Cooling system of trust bearing of super high -speed air bearing spindle (No.10-1183599)
  • - Wafer dicing for air bearing equip stopper (No. 10-1256358)
  • - The vacuum chuck molded wafer manufacturing (No. 10-1360065)
  • - Coating material and its coating method featuring heat-resistance, abrasion resistance and low friction (No. 10-0655366)
  • - Ultra sonic air-bearing spindle (No. 10-1604989)
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Ball Bearing Spindle

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Dicing Spindle

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Tapping Spindle

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Air Bearing Spindle

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PCB Drilling Spindle

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Spinner Chuck Table

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Edge Grinding Spindle

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Vesicular Ceramic Chuck Table

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Super precision Actuator

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Linear air bearing actuator

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High frequency spindle

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Durable wheel mount

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Machine tool spindle

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